A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: How do I blur a FIB made master to reduce rough edges?
How do I blur a FIB made master to reduce rough edges?
2012-11-05
Nathan McCorkle
2012-11-05
Brian Stahl
2012-11-08
Nathan McCorkle
2012-11-08
Kevin Nichols
2012-11-09
Nathan McCorkle
2012-11-08
MRC gmail
2012-11-09
Nathan McCorkle
How do I blur a FIB made master to reduce rough edges?
Nathan McCorkle
2012-11-05
I am working on microfluidics and have the opportunity to use an older FEI
FIB. My concern this whole time has been to reduce jagged edges by not
using a rastered master, originally I was thinking of building my own 405nm
laser cutter that wouldn't pulse the beam while it traced my lines.

With the FIB I'm thinking I could master gold-sputtered glass or quartz,
then do contact lithography. Since the FIB does rastering, I'm again
concerned with nanometer jaggies. Is there some way I can blur the
lithography step a bit to smooth the edges? Or maybe make features smaller
than they should be, then chemically etch the master for a brief time?

--
-Nathan
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics