Dear MEMS researchers,



Hi. Can I get the 5 microns thick SOI wafers from a vendor in the
US? 



The spec is as follows.



4 inch, (100), SOI wafers, any type, any resistivity 

Top Si : 5 microns +/- 0.5 micron

BOX : thicker than 0.5 micron

Substrate : any thickness, (100), any type, any resistivity



Quick delivery is important for me.  Any related info will be
appreciated.



Thank you.

Sincerely,

EH





---------------------------------------------
EH Yang, Ph.D 
MEMS Technology Group, M/S 302-306 
NASA's Jet Propulsion Laboratory 
4800 Oak Grove Drive, Pasadena, CA 91109-8099 
Tel:818-354-7059, Fax:818-393-6047
Email:[email protected]
URL:http://www.fujita3.iis.u-tokyo.ac.jp/~ehyang/yang.html