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MEMSnet Home: MEMS-Talk: etched glass
etched glass
2012-12-04
Fahd Ali
2012-12-04
Nadim Morhell
2012-12-05
Fahd Ali
2012-12-06
Gareth Jenkins
2012-12-06
Kuijpers, Peter
2012-12-06
Gareth Jenkins
2012-12-04
Tinka Li
2012-12-05
Tinka Li
2012-12-05
Fahd Ali
2012-12-05
Tinka Li
etched glass
Fahd Ali
2012-12-04
Hi,

I have problem regarding glass etching. I made micro-channels using HF-40% on
glass wafers. The problem is I have very sharp edges, which is not surprising.
But for my application I need smooth edges.

Is there any way during etching or after ?
your answers are highly appreciated.

regards,
Fahad
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