Hello all,

I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
someone has used thermal vacuum grease for this purpose that can be removed
easily at the end. The silicon wafer is patterned with photoresist and has
no other material on it.

Thanks
Shree
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