Hi Shree,

You meant something like Fomblin oil? 1 or 2 drops on your carrier,
smear out nicely, would do the chucking perfectly. Can also easily
remove (slide) your wafer out of your carrier wafer after DRIE. BUT, you
may have a little trouble in cleaning our wafer afterwards.

Prime Wafers
Rotterdam, NL

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Shree Narayanan
Sent: Wednesday, December 05, 2012 4:36 PM
To: General MEMS discussion
Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching

Hello all,

I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
order to etch it in a Alcatel deep-reactive ion etcher. I am wondering
if
someone has used thermal vacuum grease for this purpose that can be
removed
easily at the end. The silicon wafer is patterned with photoresist and
has
no other material on it.

Thanks
Shree
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