BHF, say 7:1, etches much slower than HF 40% on glass(cannot remember
how much slower, 10x time?) a short blanket (remove all your masking
layers) should round the corners without widening and deepening you
channels too much. Just give it a try.
Tinka
Prime Wafers
Rotterdam, NL
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Fahd Ali
Sent: Wednesday, December 05, 2012 4:46 PM
To: [email protected]
Subject: Re: [mems-talk] etched glass
Dear Li,
Yes! i mean round corners. I haven't tried with BHF. with HF i achieved
200µm depth channels, will it make sense if I do BHF after HF etching ?
regards,Fahd
> From: [email protected]
> To: [email protected]
> Date: Tue, 4 Dec 2012 23:41:26 +0100
> Subject: Re: [mems-talk] etched glass
>
> I mean, after your etch, just to round the corners.
>
> Prime Wafers
>
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_______________________________________________
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_______________________________________________
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provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
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