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MEMSnet Home: MEMS-Talk: Adhesive to bond onto a carrier wafer for etching
Adhesive to bond onto a carrier wafer for etching
2012-12-05
Shree Narayanan
2012-12-05
Tinka Li
2012-12-06
Michael Martin
2012-12-12
Shree Narayanan
2012-12-12
Michael Martin
2012-12-06
Felix Lu
2012-12-12
Shree Narayanan
2012-12-12
Bill Moffat
2012-12-12
Felix Lu
2012-12-06
Morrison, Richard H., Jr.
2012-12-12
Shree Narayanan
2012-12-12
MCNIE Mark
2012-12-07
basar bolukbas
2012-12-07
Shree Narayanan
2012-12-10
basar bolukbas
2012-12-12
Shree Narayanan
2012-12-07
Brian Stahl
2012-12-12
Shree Narayanan
2012-12-12
Brian Stahl
2012-12-11
Fei Wang
2012-12-12
Shree Narayanan
2012-12-12
Wangfei
2012-12-12
sangeeth kallatt
2012-12-07
Tang Tian
2012-12-12
Dave Roberts
2012-12-13
Xiaoguang Liu
Adhesive to bond onto a carrier wafer for etching
Morrison, Richard H., Jr.
2012-12-06
I use a layer of resist painted onto the carrier wafer that is vacuum out-gassed
before it goes in to the etcher. If you have open cavities on the backside of
the wafer you are etching then just leave vent holes in the resist to avoid
trapped air. Grease is a bad idea to hard to cleanup.

Rick


-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Shree Narayanan
Sent: Wednesday, December 05, 2012 10:36 AM
To: General MEMS discussion
Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching

Hello all,

I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in order to
etch it in a Alcatel deep-reactive ion etcher. I am wondering if someone has
used thermal vacuum grease for this purpose that can be removed easily at the
end. The silicon wafer is patterned with photoresist and has no other material
on it.

Thanks
Shree
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Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

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To unsubscribe:
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