I use a layer of resist painted onto the carrier wafer that is vacuum out-gassed
before it goes in to the etcher. If you have open cavities on the backside of
the wafer you are etching then just leave vent holes in the resist to avoid
trapped air. Grease is a bad idea to hard to cleanup.

Rick


-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Shree Narayanan
Sent: Wednesday, December 05, 2012 10:36 AM
To: General MEMS discussion
Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching

Hello all,

I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in order to
etch it in a Alcatel deep-reactive ion etcher. I am wondering if someone has
used thermal vacuum grease for this purpose that can be removed easily at the
end. The silicon wafer is patterned with photoresist and has no other material
on it.

Thanks
Shree
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