Goodmorning,

I was wondering what kind of mask was used to etch the glass in HF?
Is het Cr or Cr/Au?

best regards,

Peter Kuijpers
Senior Process Integrator
Philips Innovation Services
MiPlaza/TL group
High Tech Campus 04-p4.20
5656 AE Eindhoven
The Netherlands
Phone: +31 402798904
Mobile:+31 612507027,
Email: [email protected]

www.innovationservices.philips.com


-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Fahd Ali
Sent: Wednesday 5 December 2012 16:41
To: [email protected]
Subject: Re: [mems-talk] etched glass



Hi Nadim,
I used HF to achieve high depth of the channels 200µm. does buffered oxide
etchant can also give same result ?

regards,Fahad




> Date: Tue, 4 Dec 2012 18:16:34 -0300
> From: [email protected]
> To: [email protected]
> Subject: Re: [mems-talk] etched glass
>
> Dear Fahad. Pure HF is very agressive to glass. You should use a
> buffered oxide etchant based in ammonium fluoride. There are plenty of
> recipes out there. Give it a try...
>
> Best regards
>
> Nadim
> El 04/12/2012 20:48, "Fahd Ali"  escribió:
>
> >
> > Hi,
> >
> > I have problem regarding glass etching. I made micro-channels using
> > HF-40% on glass wafers. The problem is I have very sharp edges,
> > which is not surprising. But for my application I need smooth edges.
> >
> > Is there any way during etching or after ?
> > your answers are highly appreciated.
> >
> > regards,
> > Fahad
> > _______________________________________________
> > Hosted by the MEMS and Nanotechnology Exchange, the country's
> > leading provider of MEMS and Nanotechnology design and fabrication services.
> > Visit us at http://www.mems-exchange.org
> >
> > Want to advertise to this community?  See http://www.memsnet.org
> >
> > To unsubscribe:
> > http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> >
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk

_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider
of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk

________________________________
The information contained in this message may be confidential and legally
protected under applicable law. The message is intended solely for the
addressee(s). If you are not the intended recipient, you are hereby notified
that any use, forwarding, dissemination, or reproduction of this message is
strictly prohibited and may be unlawful. If you are not the intended recipient,
please contact the sender by return e-mail and destroy all copies of the
original message.

_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk