Hi, Shree,

Why not just use the photoresist? It works well for me.

Best regards,
Fei

2012/12/5 Shree Narayanan :
> Hello all,
>
> I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> someone has used thermal vacuum grease for this purpose that can be removed
> easily at the end. The silicon wafer is patterned with photoresist and has
> no other material on it.
>
> Thanks
> Shree
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--
Best regards,
Yours sincerely
Fei Wang
______________
Assistant Professor, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
Building 344, 1st floor, Room no. 130
DK-2800, Kgs. Lyngby
Denmark
Tel:  +45 4525 6311
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Email: fei.wang@nanotech.dtu.dk
       http://www.nanotech.dtu.dk
_______________________________________________
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provider of MEMS and Nanotechnology design and fabrication services.
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