Mr. Morrison,
Can you please tell me if the etch you attempted was 200um deep? I am
attempting 200u+ deep etches. I tried to use thermal grease but, it left me
with local heating effects that caused resist to be eaten away completely
in those areas. Does resist offer a better thermal conductivity?
Shree
On Wed, Dec 5, 2012 at 2:19 PM, Morrison, Richard H., Jr. <
[email protected]> wrote:
> I use a layer of resist painted onto the carrier wafer that is vacuum
> out-gassed before it goes in to the etcher. If you have open cavities on
> the backside of the wafer you are etching then just leave vent holes in the
> resist to avoid trapped air. Grease is a bad idea to hard to cleanup.
>
> Rick
>
>
> -----Original Message-----
> From: [email protected] [mailto:
> [email protected]] On Behalf Of Shree
> Narayanan
> Sent: Wednesday, December 05, 2012 10:36 AM
> To: General MEMS discussion
> Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching
>
> Hello all,
>
> I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> someone has used thermal vacuum grease for this purpose that can be removed
> easily at the end. The silicon wafer is patterned with photoresist and has
> no other material on it.
>
> Thanks
> Shree
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