Hello shree,
You could use cool grease for this, which is the best solution I think.
There would be other cheaper options available, but this is the best I have
seen.
Removal is very easy. You need to heat the sample above 70, and IPA could
wipe it out.
Cheers,
Sangeeth
On Dec 11, 2012 9:20 PM, "Fei Wang"  wrote:

> Hi, Shree,
>
> Why not just use the photoresist? It works well for me.
>
> Best regards,
> Fei
>
> 2012/12/5 Shree Narayanan :
> > Hello all,
> >
> > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> > order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> > someone has used thermal vacuum grease for this purpose that can be
> removed
> > easily at the end. The silicon wafer is patterned with photoresist and
> has
> > no other material on it.
> >
> > Thanks
> > Shree
> > _______________________________________________
> > Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> > provider of MEMS and Nanotechnology design and fabrication services.
> > Visit us at http://www.mems-exchange.org
> >
> > Want to advertise to this community?  See http://www.memsnet.org
> >
> > To unsubscribe:
> > http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
>
>
> --
> Best regards,
> Yours sincerely
> Fei Wang
> ______________
> Assistant Professor, Dr
> MIC - Department of Micro and Nanotechnology
> Technical University of Denmark (DTU)
> Building 344, 1st floor, Room no. 130
> DK-2800, Kgs. Lyngby
> Denmark
> Tel:  +45 4525 6311
> Fax:  +45 4588 7762
> Email: [email protected]
>        http://www.nanotech.dtu.dk
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk