A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: High Aspect ratios of SU-8
High Aspect ratios of SU-8
2013-01-14
Nirmal Punjabi
2013-01-15
Gareth Jenkins
2013-02-06
Nathan McCorkle
High Aspect ratios of SU-8
Nirmal Punjabi
2013-01-14
Hello,

Greetings for the day.
I want to make SU-8 structures with high aspect ratios ~20:1.
I want to make structures having width upto 10um & thickness of 200um.
I am using SU-8 2100.
Does anybody has some experience in fabricating high aspect ratios
structures in SU-8?
Any experiential tips in this regard will be highly appreciated.
Thank you.

Regards,

Nirmal Punjabi
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
University Wafer
Mentor Graphics Corporation
Tanner EDA by Mentor Graphics