A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Double layer SU-8 fabrication problem
Double layer SU-8 fabrication problem
2013-01-12
Bill Chow
2013-01-13
Gareth Jenkins
2013-01-14
Bill Chow
2013-01-15
Gareth Jenkins
2013-01-15
Daniel Figura
2013-01-16
Jocelyn Ng
2013-01-16
Bill Moffat
2013-01-15
Black, Robert
2013-01-17
Gareth Jenkins
2013-01-23
Tinka Li
2013-01-23
Bill Chow
Double layer SU-8 fabrication problem
Bill Moffat
2013-01-16
This sounds similar to a problem with WLP and double layers of Polyimide.  They
cure with a vacuum/hot Nitrogen balance to reduce the boiling point of the
solvent helps to remove the solvent completely and remove any wrinkles.  Bill
Moffat
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
MEMS Technology Review
The Branford Group
Harrick Plasma, Inc.