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MEMSnet Home: MEMS-Talk: gas sensing and micro hot plate
gas sensing and micro hot plate
2013-01-17
Andrea Mazzolari
2013-01-18
Peter Lange (3 parts)
2013-01-18
Michael Martin
2013-01-26
hamideh jafarpoor
2013-01-30
Michael Martin
gas sensing and micro hot plate
Andrea Mazzolari
2013-01-17
Good morning,
i'm interested to learn about fabrication processes of micro hot plates,
typically used in gas sensing.
Any advice on the most advances silicon micromachining processes and
technology used for micro hot plates fabrication ?

Best regards,
Andrea



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