How to Change Glass Roughness & How it Influences Anodic Wafer Bonding
Vijay Rajaraman
2013-03-13
Hello All,
How to make the surface of the glass substrate rough (by up to 200 nm)
? And how does this roughness influence the anodic bonding process and
its interface ?
I could imagine that higher roughness in the order of few hundreds of
nm would create contact issues between Glass-Si wafers and lead to
voids .
Any useful info, pointer or reference literature, you can provide is
much appreciated.
Thanks a lot!
VJ
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk