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MEMSnet Home: MEMS-Talk: Interchangeable test fixture for MEMS devices
Interchangeable test fixture for MEMS devices
2013-04-10
Shuo Cheng
2013-04-12
Nathan McCorkle
Interchangeable test fixture for MEMS devices
Shuo Cheng
2013-04-10
Hi,

I want to test a whole bunch of chips that have 30 440 um x 440 um contact
pads, with a pitch of 880 um. Since the functionality of these devices are
high unpredictable, I want to build a reusable fixture where chips can be
interchanged rapidly. These devices are electron emitters, so the fixture
needs to be open on the front side and be vacuum compatible. Is there any
easy and cheap way of doing this? I think this may be a pretty standard
task for MEMS people. Any suggestion would be greatly appreciated.

Shuo

--
Shuo Cheng, PhD
Postdoctoral Associate
Microsystems Technology Laboratories
Massachusetts Institute of Technology
Rm: 39-627
Office phone: 617-452-4903
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