It may help if you tell us what materials you have tried so far.

On Wed, May 22, 2013 at 4:13 AM, Xiao  wrote:
> Hello everyone,
>
> I am trying to find a high viscosity material that can fill pores (<100nm)
> of a substrate, then do patterning with photoresist on it, and removed this
> material with some solvent or even DI water, but not affecting the
> photoresist patterns.
>
> We have tried several materials for now, but didn't work very well, do you
> have any ideas of this material? Thank you!
>
> Best regards,
> Xiao
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