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MEMSnet Home: MEMS-Talk: work with thin wafers
work with thin wafers
2013-05-23
Hong Wang
2013-05-23
Salem Saadon
2013-05-29
[email protected]
2013-05-23
Tang Tian
2013-05-28
AMAT Klaus Beschorner
work with thin wafers
Hong Wang
2013-05-23
Dear All,
We start working on lithography and bonding process using  170 um thin
fused silica  for microfluidic devices. We always got broken wafers.
We are looking for materials and techniques for supporting the thin wafer.
The support wafer should be easily removed after the device is assembled.
Any input will be appreciated.
Hong
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