Hello,

dose anybody use SU-8 2050 to make 100um of thickness, I have totally
adhesion failure when I deposit it on a Omnicoat(from Microchem
too)surface on Si, when I do the development, the patterns can be
removed by twizzer, I made up to 550mj/cm2 of exposure, and PEB 95C 12
min, it still didn't work. I don't know where the problem is.

Thanks for your help

--
Tong Chen
Postdoc
SyntheCell Team
IGDR CNRS UMR 6290
2, Avenue du Professeur Léon Bernard
35043 Rennes
France

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