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MEMSnet Home: MEMS-Talk: LOR 3A and Borosilicate
LOR 3A and Borosilicate
2013-08-26
Martin,Michael David
2013-08-26
Lou Chomas
LOR 3A and Borosilicate
Martin,Michael David
2013-08-26
Hi,
  Does anyone have experience with LOR3A (w/ 1827) on borosilicate glass.  The
processing parameters, i.e. undercut rate after a 6 min 150C bake, appear quite
different than those for silicon.  That is, I am seeing a much lower undercut
rate for the borosilicate than for silicon.

Thank you,
  Michael
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