I agree with Bill however HMDS could very well work in a vapor prime Gary
Sent from my iPhone
On Sep 19, 2013, at 1:32 AM, Bill Moffat wrote:
> Hi,there are numerous silanes that can act as a bonding agent for Polymers to
glass. The most common one is Amino Propyl Tri Ethoxy Silane, APTES. It has a
different vapor pressure to HMDS the most common bonding silane for photoresist.
A common process is APTES vapor, Polymer coating then bake up to 450 degrees C
with no problems. Bill Moffat
>
> -----Original Message-----
> From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Fahd Ali
> Sent: Wednesday, September 18, 2013 2:08 AM
> To: [email protected]
> Subject: [mems-talk] adhesion agents
>
> Hi,
> I am searching for a silane coupling agent for the bonding of glass and
polymer (FEP films) . For bonding purposes I have to go up to 260°C, are there
coupling agents or adhesives available which can stand this temperature.
>
> kind regards,
> -----------------------------------------------
> Fahd Ali
>
>
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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
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Visit us at http://www.mems-exchange.org
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