BHF mixed with most acids, especially strong acids (meaning that they fully
dissociate into H+ and the anion), will form some HF (that is, the compound
[responsible for etching], not dissociated into H+ and F-). As noted in one
of the papers, "the Trilogy etch" forms HF from the ammonium fluoride and
nitric acid. Use the appropriate safety precautions for HF.
--Kirt Williams
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf
Of Dave
Sent: Tuesday, September 24, 2013 9:41 AM
To: [email protected]
Subject: Re: [mems-talk] Are there any 'safe' (non-hf) isotropic etches?
Are you sure on the NH4F safety? My understanding is that this simply
dissociates into HF once it is combined with water.
Whenever I use etchants with NH4F or ammonium biflouride I treat them like
HF.
Dave
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