Hi All,
I have SU-8 as permanent photoresist, but need one with lower CTE and thickness
as high as 70um or more. KMPR CTE is not known. So, I am looking for other
options. TMMR is another resist but has CTE more than SU-8.
Many Thanks,
Ricky Anthony
Microsystems Center
Tyndall National Institute
University College Cork
Cork, IRELAND
-----Original Message-----
From: Ricky Anthony
Sent: 24 September 2013 09:26
To: 'General MEMS discussion'; [email protected]
Subject: RE: Thick Permanent Photoresist
Hi,
Thanks for your reply. I have looked into KMPR. But I am not sure of its CTE. I
asked the company, but was told that since it is developed for molding purposes,
CTE of KMPR was ignored.
So, I was wondering if there is thick resist, with low CTE. Or any Polyimides
which can give me a thickness of (70-100um, highly unlikely).
Many Thanks,
Ricky
-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of TOPART Patrice
Sent: 23 September 2013 18:42
To: 'General MEMS discussion'
Subject: Re: [mems-talk] Thick Permanent Photoresist
Have you looked at KMPR?
Patrice Topart, PhD
Gestionnaire de groupe, Microfabrication Group Manager Microfabrication INO
2740 Einstein
Québec, Qc, Canada
G1P 4S4
G Tél/Phone: 418-657-7406, 2502
/ Fax: 418-657-7009
Email: [email protected]
: WWW: www.ino.ca
-----Message d'origine-----
De : [email protected] [mailto:mems-talk-
[email protected]] De la part de Ricky Anthony Envoyé :
Monday, September 23, 2013 5:02 AM À : [email protected] Objet : [mems-talk]
Thick Permanent Photoresist
Hi,
I was wondering if anyone can suggest me thick permanent photoresist (70-100um)
single spin. I know of SU-8 but I need resists which have lower CTE~ (as low as
20ppm/C) or close.
Many Thanks,
Ricky Anthony
Tyndall National Institute
Ireland
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