Hi Ricky,
can you provide some more detailed information about your developers and Cu film
as well as the substrate and adhesion layer if any?
________________________________________
From: [email protected] [mems-talk-
[email protected]] on behalf of Ricky Anthony
[[email protected]]
Sent: Monday, September 30, 2013 5:37 AM
To: [email protected]
Subject: [mems-talk] TMAH reaction with copper
Hi All,
I am working with Metal Ion free developers (MIF). I find that some TMAH based
MIF developers react with copper to form complex, while others do not even
though they are TMAH MIF based. What could be the possible explanation behind
this?
Many Thanks,
Ricky Anthony
Microsystems Center
Tyndall National Institute
University College Cork
Cork, IRELAND
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