Thanks Andre for the nice reply. It was really important. But is it possible
that two TMAH based developer will behave differently on contact with copper
seed (One forms complex with Cu while the other does not), even though TMAH
content is same?

Many Thanks,
Ricky

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of André Bödecker
Sent: 01 October 2013 06:16
To: [email protected]
Subject: [mems-talk] TMAH reaction with copper

Hi Ricky,



copper has a chemical affinity to form a bond with the free electron pair of
nitrogen in nitrogen-containing compounds like ammonia ( by forming this:
[Cu(NH3)4]2+) or its derivative TMAH. I'm not sure if  sterically possible for
TMAH to form a fourfold tetramethyl ammonium complex with copper or if it's only
a twofold. There is always a slight oxidation of copper under the presence of
oxygen. If there is also such a nitrogen-compound, you will have a reaction as
described above.





Best regars/Mit freundlichem Gruß



André Bödecker



Institut für Mikrosensoren, -aktoren und -systeme

Universität Bremen Fachbereich 1

Otto-Hahn-Allee1

28359 Bremen

Tel: 0421 218 62596



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