Hi all,
I am working with SU-8 molds for making microfluidic devices through
softlithography process. I am supposed to test our fabrication capability,
lithography resolution and spin coating uniformity. I need to design a mask
including features that can help me to find out the above things.
Do you guys know where I can find such mask patterns or references for designing
such patterns?
Thank you in advance for your help.
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