Hi Girija,

Try this:

Google:" mit cantilever si3n4 lab".
Open first 4 links. 4 .pdf docs will be downloaded.
These docs include a detailed info about microcantilever fabrication.

Best,
Ajy
On 24 Oct 2013 18:23, "girija moona"  wrote:

> hello everyone,
> I plan to fabricate Sio2 or Si3N4 microcantilevers for low force sensing.
> looking forward for help in this regard. I would need all the fabrictaion
> steps in detail. If anyone could help, as i am new in this area.
> Thanks
>
> Regards
> Girija
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Hosted by the MEMS and Nanotechnology Exchange, the country's leading
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Visit us at http://www.mems-exchange.org

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