Hi Youmin:



To perform an electrostatic-structural simulation using Mechanical APDL
(aka “classic ANSYS”), you can use either the 22x coupled-field elements,
the multi-field solver (MFS), or the electro-mechanical transducer element
(TRANS126).  You could also use the reduced order electrostatic-structural
element (ROM144).  The 22x elements and the MFS use a sequential coupling
approach.  TRANS126 and ROM144 use a matrix coupling approach.



If possible, I recommend using TRANS126.  It is the simplest and most
robust approach.  With the 22x elements and the MFS, you might have meshing
issues at pull-down.  ROM144 can be complicated to implement.  If fringing
effects are significant, TRANS126 might be difficult to accurately
implement.  In that case, you need to use one of the other methods.



Regards,



Daniel Shaw

ANSYS, Inc.



On Wed, Oct 30, 2013 at 9:50 PM, Youmin Wang wrote:

> Dear Friends,
>
> I am starting to use Ansys for the modeling of MEMS micromirror
> static/dynamic analysis. There have been many previous work in this field,
> but according to my observations, 3 key technologies were basically used
> for MEMS electromechanical coupling, which are 1. using Coupled Field
> Element (SOLID226); 2. Multi-field solver; and 3. Trans126.
>
> Seems for method #1 I have to use air to enclose the whole device if fringe
> electric field needs to be considered, but in "Gyimesi, Miklos, Ilya
> Avdeev, and Dale Ostergaard. "Finite-element simulation of
> micro-electromechanical systems (MEMS) by strongly coupled
> electromechanical transducers." Magnetics, IEEE Transactions on 40.2
> (2004): 557-560." it says in large deformation bending electrode problem,
> Trans126 might not be suitable.
>
> Do you guys have any previous experience on this selection issue? Besides,
> seems Trans126 also requires the pre-stress definition, which I am still
> struggling to find out where to apply...
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