Hi,

Have you tried sulphuric acid at elevated temperature say 70-80C ?
Best Regards,

Ricky Anthony

Ph.D. Student
Microsystems Center
Tyndall National Institute
University College Cork
Cork, Ireland

________________________________________
From: [email protected] [mems-talk-
[email protected]] on behalf of Gianmario Scotti
[[email protected]]
Sent: 04 November 2013 17:18:32
To: General MEMS discussion
Subject: Re: [mems-talk] Etching of ALD titania (TiO2)

I only need to etch 50 nm, but HF doesn't work with ALD TiO2 - it doesn't
etch it at all.


On Sat, Nov 2, 2013 at 12:30 AM, 조명래  wrote:

> I Am not sure how much the thickness you wanna etch. How about starting
> with conventional titanium etchant? Of course HF based etchant is dangerous
> but it surely have selectivity over Si.
> 2013. 11. 1. 오전 8:22에 "Gianmario Scotti" 님이
> 작성:
>
> > Dear MEMS researchers,
> >
> >
> > do you know of a wet etchant that would remove ALD TiO2 from silicon?
> Some
> > of my colleagues told me that they don't know of anything suitable for
> ALD
> > films of TiO2 - only TiO2 nanoparticles. Incredulous, I hit google, but
> > came up with nothing - apparently, continuous films of TiO2 are quite a
> > challenge to etch with wet etchants.
> >
> > Would any of you have a recipe that was tested as working with ALD TiO2?
> >
> >
> >
> > Cheers!
> >
> > --
> > Gianmario Scotti
> >
> > Researcher
> > Aalto University, Dept. of Materials Science and Engineering
> > http://materials.aalto.fi/en/
> >
> > Micronova, Tietotie 3
> > 02150 Espoo
> > Finland
> > _______________________________________________
> > Hosted by the MEMS and Nanotechnology Exchange, the country's leading
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> >
> _______________________________________________
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--
Gianmario Scotti

Researcher
Aalto University, Dept. of Materials Science and Engineering
http://materials.aalto.fi/en/

Micronova, Tietotie 3
02150 Espoo
Finland
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

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To unsubscribe:
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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

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