Dear MEMS community,

I am working on anisotropic etching of silicon, and need to know the
crossing angles with the (1,0,0) plane for different crystal planes. The
planes of particular interest are the (2,1,X), (3,1,X), (4,1,X), and
(5,2,X).

I would be very grateful if anyone could give me a hint on where or how
to find these angles.

With kind regards,

Knut Lian
Department of Electronics and Electrical Engineering
The University of Edinburgh
King's Buildings
Mayfield Rd
Edinburgh EH9 3JL
(Int +44) 131 650 5608 (direct)
[email protected]