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MEMSnet Home: MEMS-Talk: Questions regarding HMDS (Hexamethyldisilazane)
Questions regarding HMDS (Hexamethyldisilazane)
2013-11-22
Sk Fahad Chowdhury
2013-12-16
Gianmario Scotti
2013-12-16
Bill Moffat
2013-12-16
Daniel Figura
2013-12-17
Andrew Sarangan
2013-12-17
Nathan McCorkle
FW: Questions regarding HMDS (Hexamethyldisilazane)
2013-12-17
Bill Moffat
Questions regarding HMDS (Hexamethyldisilazane)
2013-12-20
Nathan McCorkle
2013-12-20
Bill Moffat
Questions regarding HMDS (Hexamethyldisilazane)
Sk Fahad Chowdhury
2013-11-22
Hi

I have a few questions about hexamethyldisilazane or HMDS
(CH3-Si-NH2-Si-CH3)

1.       1. Is HMDS a polar molecule? Is there any dipole present?
electronegativity values of constituents are : H 2.2, C 2.55, Si 1.9, N
3.04. Carbon (2.55) - flourine (4) bonds are polar because of their
electronegativity difference.

2.       2. How thick can HMDS on top of SiO2-Si be when it is dried in air
from a liquid state? Can the thickness of HMDS be determined when it is air
dried?
3. If HMDS is air dried and some molecules are left in sample, is it going
to be HMDS molecule or it will be something else? Will it release ammonia?
Also will it be a continuous layer or there will be clustering?

Thanks a lot :)

regards

Sk
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