hi,

if you have high electrical field on touchdown, you might be trapping charge in
the alumina and if not dissipated.

Shay

----- Original Message -----
From: Youmin Wang 
Date: Wednesday, December 4, 2013 2:49
Subject: [mems-talk] Anti-stiction coating
To: General MEMS discussion  PFDA
coated on ALD Alumina. But seems the stiction and adhesion are> still large. I
wonder if anyone of you have done surface treatment before the deposition of
PFDA on alumina? Thanks.

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