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MEMSnet Home: MEMS-Talk: Questions regarding HMDS (Hexamethyldisilazane)
Questions regarding HMDS (Hexamethyldisilazane)
2013-11-22
Sk Fahad Chowdhury
2013-12-16
Gianmario Scotti
2013-12-16
Bill Moffat
2013-12-16
Daniel Figura
2013-12-17
Andrew Sarangan
2013-12-17
Nathan McCorkle
FW: Questions regarding HMDS (Hexamethyldisilazane)
2013-12-17
Bill Moffat
Questions regarding HMDS (Hexamethyldisilazane)
2013-12-20
Nathan McCorkle
2013-12-20
Bill Moffat
Questions regarding HMDS (Hexamethyldisilazane)
Nathan McCorkle
2013-12-17
On Mon, Dec 16, 2013 at 8:27 PM, Andrew Sarangan  wrote:

> Here is the reference to that paper:
> http://dx.doi.org/10.1016/0166-6622(84)80153-5

Thanks for the reference Andrew, I found the paper available online
here (connection is a bit slow, it took me about 45 seconds to
download its 1.3 MB):
http://libgen.org/scimag/get.php?doi=10.1016%2F0166-6622%2884%2980153-5
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