Hi,
I work at the Nanotechnology Platform of IBEC Institute of Barcelona, and
we would like to use NIL system to replicate a nanolithography silicon
master (with lines 50nm width).
We need a Chemical Vapor Deposition system to deposite fluorinated silane
to improve the antiadhesion properties between the master and the polymer.
Do you know where we can do this?
Thanks a lot.
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