Check YES 5 different models for silane deposition. Bill Moffat

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On Jan 29, 2014, at 2:44 PM, "Judith Linacero Blanco" 
wrote:

> Hi,
>
> I work at the Nanotechnology Platform of IBEC Institute of Barcelona, and
> we would like to use NIL system to replicate a nanolithography silicon
> master (with lines 50nm width).
>
> We need a Chemical Vapor Deposition system to deposite fluorinated silane
> to improve the antiadhesion properties between the master and the polymer.
>
> Do you know where we can do this?
> Thanks a lot.
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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

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