I know CSEM in switzerland has a MVD system (from Applied Microstructures)
which you can use to do a vapor coating for release layer.
Lisong


  _____

From: Judith Linacero Blanco [mailto:[email protected]]
To: [email protected]
Sent: Wed, 29 Jan 2014 02:42:02 -0800
Subject: [mems-talk] Chemical Vapor Deposition System

Hi,

  I work at the Nanotechnology Platform of IBEC Institute of Barcelona, and
  we would like to use NIL system to replicate a nanolithography silicon
  master (with lines 50nm width).

  We need a Chemical Vapor Deposition system to deposite fluorinated silane
  to improve the antiadhesion properties between the master and the polymer.

  Do you know where we can do this?
  Thanks a lot.
  _______________________________________________
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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk