Insulator Suitable for Laser machining for MEMS Device
Nitish Kumar
2014-02-10
ALL,
I am working on mems cantilevers and have decided to use laser machining
instead of lithography . Can you suggest the best material , essentially an
insulator that can be used for the purpose. If you can suggest a
Peizoelectric material that will be best for me.
thanking you,
Nitish Kumar
IIST
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