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MEMSnet Home: MEMS-Talk: Bonding LTG:GaAs to SiN?
Bonding LTG:GaAs to SiN?
2014-02-16
Antonino Miceli
2014-02-16
Bill Moffat
2014-02-16
Bill Moffat
Bonding LTG:GaAs to SiN?
Bill Moffat
2014-02-16
If you want to test plasma bonding I can help. Bill Moffat

Sent from my iPad

On Feb 16, 2014, at 6:27 AM, "Antonino Miceli"  wrote:

> Hi all,
>
> We are trying to bond LTG:GaAs to SiN. Does anyone have experience with
> this? Any references?
> Would an SiO2 adhesion layer help?
>
>
> We are trying to make a photoconductive switch on a SiN membrane (released
> after bonding!).
>
> Thanks,
> Nino
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