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MEMSnet Home: MEMS-Talk: Wet etching PDMS (KOH etch mask)
Wet etching PDMS (KOH etch mask)
2014-01-22
Abhinav Jain
2014-01-23
Andrew Sarangan
2014-01-23
Daniel Vercosa
2014-01-23
John Bohland
2014-02-26
Abhinav Jain
Wet etching PDMS (KOH etch mask)
Abhinav Jain
2014-02-26
Thanks all for your replies.
Based on different replies, I feel the that best solution is to use a solid
chuck with sealing rings to protect one side. Does anyone any company which
provides these type of chucks in US?

Thanks
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