SU8 is an epoxy and you need an epoxy stripper to take it off.
If I remember right, Microchem sells a material that you spin under the SU8 that
enables you to remove it later

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of ???
Sent: Thursday, April 03, 2014 8:28 AM
To: General MEMS discussion
Subject: [mems-talk] su-8 2002 removal method

I used SU-8 2002 for sacrificial layer(about 2um).

after whole process is finished, I want to remove SU-8 layer.

but, it is very hard. I used Remover PG(80℃, 30min) but it is
indissolubleness(?).

For forming mems sensor, the metal layers are deposited around a SU-8 layer.

So I want to remove SU-8 2002 without damages of other structures.

How can I do it?
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