On 4/3/14 7:54 PM, shay kaplan wrote:
> SU8 is an epoxy and you need an epoxy stripper to take it off.
> If I remember right, Microchem sells a material that you spin under the SU8
that enables you to remove it later
>
> -----Original Message-----
> From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of ???
> Sent: Thursday, April 03, 2014 8:28 AM
> To: General MEMS discussion
> Subject: [mems-talk] su-8 2002 removal method
>
> I used SU-8 2002 for sacrificial layer(about 2um).
>
> after whole process is finished, I want to remove SU-8 layer.
>
> but, it is very hard. I used Remover PG(80℃, 30min) but it is
indissolubleness(?).
>
> For forming mems sensor, the metal layers are deposited around a SU-8 layer.
>
> So I want to remove SU-8 2002 without damages of other structures.
>
> How can I do it?
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Hello,
you can try Omnicoat. That sacrificial layer will help remove the SU8.
--
Tong Chen
Postdoc
SyntheCell Team
IGDR CNRS UMR 6290
2, Avenue du Professeur Léon Bernard
35043 Rennes
France
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