Hello,

Has anyone used Protek B3 coating for protection against KOH and knows how to
effectively REMOVE it after KOH etch? I am doing a process in which I am using
4.5 um of Protek B3 coating to protect my Silicon nitride cantilevers against
KOH etch. I would like to know how to REMOVE the B3 coating after the KOH etch?
Both dry and wet removal processes would be helpful.
Note: Since my underlying layer is silicon nitride, will using CF4/O2 mixture to
remove B3 coating, remove silicon nitride as well?

Thanks
Ahmad
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