TMAH-based developers etch Al slowly and as far as I know don't etch
titanium at any appreciable rate.  It might be worth looking into.  -Alex


On Mon, Apr 28, 2014 at 5:06 PM, Xiaoning Wang  wrote:

> Hello,
>
> I'm trying to find a way to etch aluminum oxide without attacking titanium.
> Several common Al2O3 etchant I tried all etch Ti quite fast as well, such
> as NaOH, H3PO4, NH4OH, etc. Can anyone suggest a way to achieve selective
> etching between these two?
>
> Any advice will be greatly appreciated! Thank you very much!
>
> --
> Travis
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