Asc,

It really depends on your process, but we were able to use Ebeam evaporation for
lift-off metal.  Since the resist would reflow at about 120C, I can safely say
we were below that temperature.

If I remember right, the temperature gauges we used setting up the process said
we were reaching temperatures of about 100C regularly.

Dan

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Ashay Chitnis
Sent: Saturday, May 03, 2014 2:42 AM
To: [email protected]
Subject: [mems-talk] Substrate temperature in Ebeam

Hi,

I would like to know temperature of substrate in ebeam and sputter for standard
metals and dielectrics.

Asc
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