What kind of Lithography tool are you using. Can you put in a focus offset to
focus at the bottom of the pit?

Robert

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Malar C
Sent: Tuesday, May 06, 2014 6:23 AM
To: [email protected]
Subject: [mems-talk] Comb Structure Lithography

Hi all,

I have done etching in Si using RIE to about 260 um. Now I need to pattern comb
structure at the bottom of the pit which I couldn’t achieve.  I took measures to
reduce the roughness using HNA and got reduced roughness less than 100 nm. But
comb lithography is still a problem. Is it a problem with roughness or
lithography? Can anyone suggest me how to form the comb structure?



Malar
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