A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Comb Structure Lithography
Comb Structure Lithography
2014-05-08
Malar C
2014-05-08
Black, Robert
2014-05-09
Yongliang Yang
2014-05-09
Malar C
2014-05-09
Malar C
2014-05-12
Daniel Figura
2014-05-14
Malar C
Comb Structure Lithography
Yongliang Yang
2014-05-09
I did lithography in 300 um deep trenches by using steper (ASML MIS
mode)and it worked great. 260um may out of the range of focus offset. If
that is the case, you can manually control the machine to level the wafer
in the trenches.

Good luck.

Best,
Yonlgiang


On Thu, May 8, 2014 at 8:49 AM, Black, Robert  wrote:

> What kind of Lithography tool are you using. Can you put in a focus offset
> to focus at the bottom of the pit?
>
> Robert
>
> -----Original Message-----
> From: [email protected] [mailto:
> [email protected]] On Behalf Of Malar C
> Sent: Tuesday, May 06, 2014 6:23 AM
> To: [email protected]
> Subject: [mems-talk] Comb Structure Lithography
>
> Hi all,
>
> I have done etching in Si using RIE to about 260 um. Now I need to pattern
> comb structure at the bottom of the pit which I couldn’t achieve.  I took
> measures to reduce the roughness using HNA and got reduced roughness less
> than 100 nm. But comb lithography is still a problem. Is it a problem with
> roughness or lithography? Can anyone suggest me how to form the comb
> structure?
>
>
>
> Malar
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
The Branford Group
Mentor Graphics Corporation
Harrick Plasma, Inc.