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MEMSnet Home: MEMS-Talk: Comb Structure Lithography
Comb Structure Lithography
2014-05-08
Malar C
2014-05-08
Black, Robert
2014-05-09
Yongliang Yang
2014-05-09
Malar C
2014-05-09
Malar C
2014-05-12
Daniel Figura
2014-05-14
Malar C
Comb Structure Lithography
Malar C
2014-05-09
Thank you for the reply

I am using contact lithography with minimum feature size of 5 um. I won't
be able to use focus offset to focus at the bottom of the pit.


Malar
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