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MEMSnet Home: MEMS-Talk: Comb Structure Lithography
Comb Structure Lithography
2014-05-08
Malar C
2014-05-08
Black, Robert
2014-05-09
Yongliang Yang
2014-05-09
Malar C
2014-05-09
Malar C
2014-05-12
Daniel Figura
2014-05-14
Malar C
Comb Structure Lithography
Malar C
2014-05-14
Many thanks for your elaborate suggestion, Daniel.

I am trying to pattern 5 um feature size at the bottom of the trench. I am
using Karl Suss MA6 Mask Aligner.

Since my feature size is 5 um, its not possible to make use of the
suggested technique. Also I dont have access to the internal parts of the
system.


-Malar
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