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MEMSnet Home: MEMS-Talk: Alignment problem with Multilayer SU-8 fabrication
Alignment problem with Multilayer SU-8 fabrication
2014-05-15
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2014-05-14
Bill Chow
2014-05-14
Gareth Jenkins
2014-05-14
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2014-05-16
Jiho Song
2014-05-16
Daniel Figura
2014-05-16
hamideh jafarpoor
2014-05-16
王舒禹
2014-05-16
Matthieu Nannini
2014-05-16
sangee vs
2014-05-19
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Alignment problem with Multilayer SU-8 fabrication
Jiho Song
2014-05-16
Bill,

You can make the mask with the design that has the alignment mark on left
and right edge of wafer.

So, you can spin-coat the first layer and drop some developer on both left
and right edge of wafer, then you will able to see clearly where to align
the second layer. Of course, you need the exactly same align mark on your
second layer pattern.

Let me know if this is clear.

Thanks.
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