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MEMSnet Home: MEMS-Talk: Best recipe to etch sio2 using CHF3 gas with ULVAC NE-550
Best recipe to etch sio2 using CHF3 gas with ULVAC NE-550
2014-05-19
Ryan
2014-05-19
Martin,Michael David
2014-05-20
Ryan
2014-05-21
Martin,Michael David
Best recipe to etch sio2 using CHF3 gas with ULVAC NE-550
Ryan
2014-05-19
Hi.

I am wondering what is the best recipe for etching Sio2 using CHF3 gas with
NE-550 ULVAC?

I do not have any knowledge or data for that.

If possible, could anyone please leave any method with gas and power or
something with care?

Thanks

Ryan

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